Fast Medium Precision Chemical Composition Study Using EDS Microanalysis System

Quantitative and qualitative determination of the elemental composition of the sample by detecting chemical elements from Boro5 to Americio95 at the selected point (spatial resolution 1-2 μm, depending on the measurement conditions, information is obtained from 0.5-2 μm depth). It is also possible to map the distribution of individual chemical elements in the sample area.

The device is used for qualitative and quantitative microanalysis. The device can determine the elemental composition of the sample surface and the density distributions of the elements in the surface area.