Quick, low-precision (spatial accuracy about 2-4 millimeters, profiling depth precision tens-hundreds nanometers) qualitative and quantitative elemental composition analysis. Ability to perform depth profiling, composition control and comparison between surface and deeper layers.
The device is intended for qualitative and quantitative elemental analysis of solids (metals, alloys and other materials) including profiling of thin layers / layer systems with conductive and non-conductive layers. Also, the device is suitable for detecting differences in chemical composition between the surface and surface layers of the sample.
