Variable pressure scanning electron microscope can be used to analyze both conductive and dielectric samples. It is also possible to analyze biological objects with certain limitations. SEM resolution at 30 kV accelerating voltage is 3 nm, while at 3 kV accelerating voltage, 8-10 nm resolution is achieved. We can create images with both secondary and reflective electron detectors, so there is a possibility to separately highlight the unevenness of sample morphology, elemental composition, and extract detailed pseudo 3D images.
Investigation of structure and morphology of conductive, semiconductor and non-conducting sample surfaces, including elemental composition measurements by EDS.
